Mechanical behavior of thin metal films; the effect of environmental species on the adhesion and delamination of multilayered structures containing low-k dielectrics.
Quantitative Interfacial Energy Measurements of Adhesion-Promoted Thin Copper Films by Supercritical Fluid Deposition on Barrier Layers. (2010)
Fracture of organosilicate glass thin films: environmental effects. (2005)
Melissa Majkut (617) 496-5167